Expertise MEMS resonator

Simulating a MEMS resonator is important in the production for the semiconductor industry. Several modes of the COMSOL software could be used to map the vibration and energy losses. Some examples:

  • vibrations and natural frequencies
  • mode coupling
  • anchor loss
  • damping in silicon material
  • low pressure gas damping of the resonator
  • influence of trace contamination
  • electrical capacitance as a function of the driver frequency.